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Engineer Polytech'LilleMaster's degrees in engineeringMechanical EngineeringSoftware Engineering and Statistics Civil EngineeringBiological and food engineering Electrical and Computer Engineering Measurement Systems and Applied Business Materials Science

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Semestre 8
  8.2 Materials 2 (614200)
    Semiconductor materials 2 (614220)

Teacher(s) : Joseph HARARI

Section CNU : 63

ECTS : 1.5

Objectives to be met

The aim of this module is to describe the differents aspects of the technological processes existing in micro- and nano-fabrication in the field of semiconductor materials. The practical session deals with a complete process control in clean room.

Course description

After the different methods of fabrication (Growth, implantation, diffusion) we present the main technological steps (lithography, etching, deposition) and examples are given : a device (transistor), an integrated circuit (processor), a system (mobile phone) where different materials
are involved (Semiconductors, metals, polymers).

Prerequisites

Courses :
Microelectronic devices
Semiconductor materials 1

Knowledge of polymers (lithography, packaging)
Knowledge of crystals (growth, structure)

Schedule

Total :	20h
Lectures :	8h
Practical work :	12h

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